Equipment List

  • Processing equipment Freeform Optical Part Processing Machine
    • Model Nanoform X
    • Manufacturer AMETEK Precitech
    • Specifications

       - Turning performance : surface roughness < 1 nm Ra, Form accuracy < 0.1 micron P-V
      - Ultimate load capacity : 136 kg (300 pounds) @ 100 psi
      - Swing capacity : Max swing 300 mm diameter
      - Programing Resolution : 0.01 nm linear
      - Micro-LAM(Laser Assisted Machine)
      - Micro Milling : Max. 80,000 RPM

  • Processing equipment Ultra Precision CNC tool Grinder
    • Model PG4
    • Manufacturer COBORN Engineering Co Ltd
    • Specifications

      - Tool post: +/-20° tilt cylindrical clearance

      - Planetary Motion : 0.1° planetary position resolution

      - Anti-Bearing Pivot : ‹ 50nm rotational error, Maximum arc of rotation 182°

  • Processing equipment High Precision Vertical Machine
    • Model S90 Linear
    • Manufacturer (주)CORRON
    • Specifications

      - Travel Range : X 900 mm, Y 900 mm, Z 540 mm

      - Table size : 920 X 920 mm

      - Table loading capacity : 1,000 kg

      - Spindle Speed : 42,000 RPM/E40

      - Max. Feedrate : 100 m/min

      - Scale Feedback Resolution : 1 nm

  • Measuring equipment 3D measuring laser microscope
    • Model OLS5000-LAF
    • Manufacturer OLYMPUS
    • Specifications

      - Total magnification : 54x - 17,280x

      - Height configuration

        · Measurement range : 37 mm

        · Display resolution : 0.5 nm

        · Repeatability : 100x - 12 nm

        · Accuracy : ± 1.5 %

      - Width configuration

        · Measurement range : 300 X 300 mm

        · Resolution : 1 nm

        · Repeatability : 100x - 20 nm

        · Accuracy : ± 1.5 %

  • Measuring equipment MTF Measuring Instrument for Optical system
    • Model ImageMaster Universal
    • Manufacturer Trioptics
    • Specifications ⊙ Measurement of MTF configuration
      - Aperture Size : ~ Up to Diameter 300 mm
      - Accuracy MTF(Vis) : ±0.02 MTF On-Axis
      - Accuracy MTF(IR) : ±0.03 MTF On-Axis
      - MTF Repeatability(Vis) : ±0.01 MTF
      - MTF Repeatability(IR) : ±0.02 MTF
      - MTF off-axis angle up to ±75 deg
      - Optical set up : Finite, Infinite or Afocal
      ⊙ Spectral Range
      - UV (250 ~ 400 nm)    - Vis (400 ~ 700 nm)
      - NIR (700 ~ 1000 nm) - SWIR ( 1~1.5 ㎛)
      - MWIR (3~5 ㎛)           - LWIR ( 8~13 ㎛)
      Further optical parameter
      - EFL (Vis) : Accuracy ≤ 0.2% , Repeatability ≤ 0.1%
      - EFL (IR) : Accuracy ≤ 0.5% , Repeatability ≤ 0.2%
      Seidel 5 Aberration
      - Aberration/Distortion/Astigmatism/Field curvature/Coma
  • Measuring equipment Ultra precision aspheric measuring instruments
    • Model PGI Freeform XL
    • Manufacturer Taylor Hobson
    • Specifications - Measurement range for X, Y-axis: 200 mm
      - Measurement range for Z-axis : 14 mm(Shot), 28 mm(Long)
      - X, Y axis accuracy : ±50 nm
      - Z axis accuracy : ±75 nm
      - Max. measurement speed : 10 mm/sec
      - probe measuring Force : 0.5 ~ 1.2 mN
      - Max. measurement angle : 55˚
      - Max. loading capacity : 10 kg
      - Measurement of surface profile : Flat, Sphere, Asphere, Freeform
  • Measuring equipment Non-contact ultra precision shape measuring inst
    • Model LuphoScan 420HD
    • Manufacturer Taylor Hobson
    • Specifications -Axis configuration : X, Y, Z, C(4-axis)
      -Measurement range for X, Y, Z-axis : 420, 420, 100 mm
      -Max. sample diameter : Φ420 mm
      -Z-axis resolution : 0.1 nm
      -X, Y, Z axis accuracy : ±50 nm
      -Max. measurement angle : 90˚
      -Max. loading capacity : 50 kg
  • Measuring equipment UV-Visble-IR Transmittance/Reflectance Tester
    • Model Lambda 1050+
    • Manufacturer Perkin Elmer
    • Specifications

      -Max. sample size : 200 X 200 X 200 mm or Ø150 mm

      -Wavelength Range : 175 ~ 3,300 nm

      -Wavelength accuracy UV-Vis(200 ~ 760 nm) : ± 0.08 nm IR(760 ~ 3,300 nm) : ± 0.3 nm

      -Wavelength Resolution UV-Vis(200 ~ 760 nm) : ≤0.05 nm IR(760 ~ 3,300 nm) : ≤0.2 nm

  • Measuring equipment IR transmittance tester at variable indident ang
    • Model Frontier
    • Manufacturer Perkin Elmer
    • Specifications

      -Max. sample size : 2 inch or Ø50 mm

      -Wavelength Range : 8,300 ~ 30 〖cm〗^(-1)

      -Wavelength accuracy : 0.02 〖cm〗^(-1)

      -Wavelength Resolution : 0.4 〖cm〗^(-1)

      -Wavelength Precision : 0.008 〖cm〗^(-1)

      S/N ratio : 50,000 : 1 @MIR, 30,000 : 1 @FIR

  • Measuring equipment Optical lens module performance tester
    • Model NED-LMD E101
    • Manufacturer Gamma Scientific
    • Specifications

      -Measurement area : 16 X 12 degree

      -Measurement range of luminance : 0.1 ~ 10,000 nits

      -X, Y, Z positioning precision : ±0.02 mm

      -View space(H, W, D) : 50 X 250 X 30 mm

      -Wavelength range : 360 ~ 940 nm

      -Wavelength accuracy : ±0.2 nm

      -Spectroradiometer resolution : 0.6 nm

  • Measuring equipment Smart aligner Optical Sensor
    • Model ProCAM Align Smart
    • Manufacturer Trioptics
    • Specifications

      -Linear alignment resolution :

      -Final linear alignment accuracy :

      -Tilt alignment resolution :

      -Find tilt alignment accuracy :

      -Max. sample size : Ø30 mm

      -Max. UPH(Units per Hour) : 120

  • Measuring equipment 3D Optical surface profile
    • Model NPFLEX
    • Manufacturer Bruker
    • Specifications - Lateral resolution : 0.069 ㎛ - Max. Sample Height : 259 mm
      - Vertical Scan Range : 10.04 mm - Vertical resolution : ≤ 0.1 nm
      - Sample stage tilt : ± 4.38˚ - Step height accuracy : 0.037%
      - RMS Repeatability : 0.0041 nm
      - Camera Pixel : 1.2 MP - Max. Sample loading capacity : 50 kg
      - Measurement range reflectivity : 0.1~100%
      - Light Source : LED(Green, White)
      - Turret : Motorized 5 position
  • Measuring equipment Ultra precision final inspection system for lens
    • Model LAS-UP
    • Manufacturer Opto Alignment Technology Inc
    • Specifications - Z-axis travel range : 1,000 mm
      - Max. Sample weight : 400 Kg
      - Max. Sample diameter : Ø300 mm
      - Alignment Accuracy : 2 ㎛
      - Centering measurement accuracy : 0.1 ㎛
      - Center thickness and air gap measurement accuracy : 2 ㎛
      - Air bearing spindle accuracy : 100 nm
      - Max. optical sample thickness : 400 mm
      - Number of surface : 20 surface or over
      - Light Source : Red, Green, Blue, MWIR, LWIR
  • Processing equipment Aspheric Ultra precision CNC Multi axis Hybrid m
    • Model 650FG v2
    • Manufacturer Moore Nanotechnology Systems
    • Specifications - Linear axis travel range(X,Y,Z) : 350, 150, 300 mm
      - Rotation axis travel range(B,C) : Bi-directional infinity 360˚
      - Workpiece(C-axis) Max. speed : 10,000 RPM
      - Workpiece swing capacity : Ø750 mm
      - Workpiece loading capacity : 102 kg
      - Workpiece motion accuracy : 15 nm
      - Rotary table(B-axis) swing capacity : Ø280 mm
      - Rotary table positioning accuracy : ±1.0 arc-sec
      - Linear axis Programming resolution : 0.01 nm
      - Linear axis position feedback resolution : 0.01 nm
      - Rotation axis Programming resolution : 0.000,000,1˚
      - Rotation axis position feedback resolution : 0.01 arc-sec
  • Processing equipment Ultra precision nano grooving machine
    • Model NIC-300PS5-N5
    • Manufacturer Nagase Integrex
    • Specifications - Linear Axis(X,Y,Z) : 400×650×180 mm
      - Linear axis feedrate(X,Y,Z) : 20,000×20,000×1,000 mm/min
      - Rotation Axis(C,A) : Bi-directional Infinity 360˚
      - Rotation Axis speed(C,A) : 10RPM
      - Table Diameter : 350 mm
      - Table loading capacity : 300kg
      - Programming resolution : 1nm - Scale feedback resolution : 0.1nm
  • Measuring equipment Optical lens module Tester for Infrared
    • Model Imagemaster HR MAX
    • Manufacturer Trioptics
    • Specifications - Optical set-up : Infinite conjugates (finite optional)
      - Max. off-axis angle : Up to ±70˚
      - Spectral range : NUV~NIR (or 300~2,500 nm)
      - Max. image height : ±23 mm
      - Clear aperture : up to 100 mm
      - EFL range of the sample : 1~200mm
      - Max. spatial frequency : ~1,000 lp/mm
      - Accuracy : ±0.02 MTF(or 2%)
      - Repeatability : ± 0.005 MTF (or 0.5%)
      - Parameters to be measured : MTF in infinity conjugate configuration/
      MTF on-axis, MTF off-axis or offaxis/EFL/FFL(relative)/Distortion/Astigmatism/
      Field curvature/Chromatic aberrations/CRA

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